Created exclusively for use in Chemical Mechanical Planarization (CMP) tools, the patented Malema Interconnect Interlock Device (MIID-1000) By-Pass Leak Detection and Prevention System, has been designed specifically to protect against liquid back-flow and internal bypass leaks. This capability is created via a manifold of pneumatically actuated valves that operate in a coordinated fashion in order to ensure that CMP-liquid supplies cannot be contaminated before use or during the actual CMP process. MIID-1000 has retrofit kits that can be installed into existing CMP tools.
MIID-1000 Malema Interconnect Interlock Device Features:
- All high purity PTFE and PFA construction of the wetted components.
- Non-wetted surfaces of PFA and PVDF
- Integrated design for compact, space savings installation.
- Designed for minimal head loss
- Field configurable flare connections [Inlets can be configured as either or 3/8 flare nipples] allowing for simplified retrofit installation and reduced inventories
- Valve components tested to over 10,000,000 cycles in DIW (over 1,050,000 in Cabot SS-12).
- Valve Cv = 0.8
- Built-in leak detection & monitoring
- Built-in optical valve position sensing
MIID-1000 Malema Interconnect Interlock Device Specifications:
| Media pressure | 0 to 80 PSIG 0 to 5.5 Bar |
| Pneumatic actuation pressure | 60 to 120 PSIG 4.1 to 8.3 Bar |
| Media Temperature | 0F to 266F (excluding phase changes) -17.7 C to 130 C |
| Ambient Temperature | 0F to 150F (no freezing liquids) -17.7 C to 65.5 C |
| Wetted Surfaces | PFA & PTFE(modified) |
| Non-Wetted Surfaces PFA, PVDF |
|
| POU Outlet | Flare nipple |
| Vent-Drain Outlet | 3/8 Flare nipple |
| Overall Dimensions (each MIID block) | o Height 5.50 139.70 mm o Width 3.75 95.25 mm o Length 6.50 165.10 mm |
| Overall Dimension (Three(3) MIID Kit) | o Height 5.50 139.70 mm o Width 11.25 285.75 mm o Length 6.50 165.10 mm |
| Overall Dimensions (PLC Module) | o Height 2.75 70.00 mm o Width 3.68 93.00 mm o Length 6.31 160.00 mm |
Download Malema MIID-1000 Malema Interconnect Interlock Device Datasheet
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Designed specifically to protect against liquid back-flow and internal bypass leaks.