The BDV Series is a rounded, compact UHP stainless steel diaphragm Valve offering excellent leak integrity, high cycle life, and low particle generation. It is a "positive retraction" diaphragm valve that enables precise control of gas and liquid distribution. The BDV series excels in high-flow, low pressure conditions. It is ideal for semiconductor manufacturing processes such as bulk distribution systems, valve manifold boxes, and tool hook-up applications where absolute purity and top-tier performance are required.
4 Key Benefits of Using Bulk Diaphragm Valves (BDV) in Semiconductor Gas Delivery
BDV Series Ultra-high Purity Bulk Diaphragm Valve Features
- Round compact design for point-of-use applications
- Superior corrosion resistance
- Fully traceable UHP 316L stainless steel body
- 10 Ra fully electropolished surface finish
- Superior cleanliness
- Tied diaphragm minimizes particle generation and entrapment
- Assembled, tested, and packaged in Class 100 cleanroom
BDV Series Ultra-high Purity Bulk Diaphragm Valve Benefits
- High cycle life and adaptability
- 316L Stainless Steel diaphragm
- Multiple end connection types and sizes
- Face seals to tub stubs
- Quality ensured
- 100% helium leak tested prior to shipping
The operating pressure for the BDV ranges from vacuum to 300 psig. The flow capacity is 2.8 Cv. The BDV's features and benefits make it ideal for systems such as ultra-high purity bulk gas laterals, gas control panels and valve manifold boxes. The BDV's multiple body style surface mount configurations make it an ideal choice for point-of-use applications to fit the packaging footprint for the tool hook up.
Parker has built its reputation in the ultra-high purity semiconductor market by providing innovative, high performing gas and chemical delivery products with excellence leak integrity, cleanliness and high cycle life.
Download Parker Veriflo's BDV Series Ultra-high Purity Bulk Diaphragm Valve Datasheet
Would you like to speak to one of our technical specialists to learn more? Just fill out the form below.
The BDV Series is a rounded, compact UHP stainless steel diaphragm Valve offering excellent leak integrity, high cycle life, and low particle generation.